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AZtecTEM
The Wave spectrometer delivers the highest spectral resolution available for the SEM due to its unique, fully focusing Rowland circle geometry and curved crystals. The AZtecWave software combines the unique capability of the Wave spectrometer with Ultim Max for EDS to deliver a highly sensitive and accurate solution for major through to trace element analysis on the SEM.
The Wave spectrometer provides:
Separation of more X-ray peak overlaps, providing positive element identification and accurate quantification
Lower detection limits (<100 ppm for many elements)
Wave provides for the highest spectral resolution for the SEM – for the separation of closely spaced X-ray lines
The highest SEM-WDS resolution available - for separation of closely spaced lines, such as S Kα = 2.307 keV and Mo Lα = 2.293 keV
Spectrometer miniview in the AZtecWave software
AZtecWave brings electron microprobe (EPMA) like performance to the SEM – enabling an effective combination of highly accurate quantitative elemental analysis with high resolution electron imaging and other SEM-based techniques (e.g. EBSD).
| Composition of a stainless steel determined by a combination of EDS and WDS in AZtecWave
Wave Spectrometer with W1 electronics | |
Design/geometry |
Fully focussing 210 mm Rowland circle with a 2θ range of 33° to 135° |
Orientation on SEM column |
Inclined |
Attachment to SEM |
Interface with motorised gate valve as standard |
Diffracting crystals |
Maximum of 6 on rotating crystal turret |
Quantification range |
Wave 500 spectrometer = 0.17 – 10.84 keV (B to Pu) |
Spectral resolution |
Si Kα = <2 eV |
Detection limit |
Si Kα = 9 ppm |
X-ray counters |
P10 (Ar-CH4) flow proportional counter and Xe sealed proportional counter mounted in tandem |
The Max+ interface has apertures of varying size used to reduce X-ray count rate into the EDS detector when working at very high beam currents
Wavelength Dispersive Spectroscopy (WDS) lends itself to applications requiring quantitative compositional results from solid samples, particularly where concentrations of minor and trace elements need to be accurately determined. Application examples exist in a wide range of sectors, including metallurgy, geology, electronics, semiconductors, forensics, and energy generation and storage. Combining WDS with EDS analysis, through AZtecWave, provides a versatile system for non-destructive, compositional analysis in the SEM.
Discover detailed applications examples